Linde LienHwa Electronic Specialty Gases (ESG)

Through close partnership with Linde, the leading global industrial gases and engineering company, Linde LienHwa has the capability to provide various high quality electronic specialty gases and gas-application technologies. Furthermore Linde LienHwa continues to invest in high-efficiency specialty gases production facilities to meet the top industry requirements.

Our Expertise

Safety

  • Top emergency response capability (HIRT)
  • Safety and operation benchmarked against global leaders for best practice

People

  • Expert members in electronic materials business management and plants operation

Quality

  • Ensuring highest quality products customized to customer needs

Products

  • >20 in-house products
  • >70 product portfolio
  • Strategic partnership with suppliers and customers

Technology

  • Electronics R&D Center (ERDC) for advanced analysis capability and new product development
  • Technical engagement with customers

Localizing ESG production

  • New Taoke facility investment in Kuanyin
  • Continuous production expansion at Chungkang plant
  • Mainland China NH3, N2O, and HBr plants Our investment

Our investment

Taiwan leading electronic gas manufacturer

  • Linde LienHwa north Taiwan manufacturing plant
  • Linde LienHwa central Taiwan manufacturing plant
  • Linde LienHwa south Taiwan manufacturing plant

China leading electronic gas manufacturer

  • Linde LienHwa TainJin investment production plant
  • Linde LienHwa Zhenjiang manufacturing plant
  • Linde LienHwa Xiamen manufacturing plant
  • Linde Suzhou manufacturing plant

Our Product Portfolio

Deposition / Thin film

Argon
(Ar)
Helium
(He)
Hydrogen
(H2)*
Nitrogen
(N2)*
Mixtures
(Calibration etc)
Hexachlorodisilane
(HCDS)
Octafluorocyclobutane
(C4F8)
Nitrogen trifluoride
(NF3)
Nitrous oxide
(N2O)
1% / 10% Germane mixture
(GeH4 / H2)
Ammonia
(NH3)
Dichlorosilane
(SiH2Cl2)
Disilane
(Si2H6)
Germane
(GeH4)
Hexachlorodisilane
(Si2Cl6)
Silane
(SiH4)
Trichlorosilane
(SiHCl3)
     

Etch

Argon
(Ar)
Helium
(He)
Hydrogen
(H2)*
Nitrogen
(N2)*
Mixtures
(Calibration etc)
Otafluorocyclobutane
(C4F8)
Hydrogen Bromide
(HBr)
Carbonmonoxide
(CO)
Carbondioxide
(CO2)
Tetrafluromethane
(CF4)
Sulfuehexafluroide
(SF6)
Boron trichloride
(BCl3)
Carbon monoxide
(CO)
Chlorine trifluoride
(ClF3)
Halocarbon 116
(C2F6)
Halocarbon 218
(C3F28)
Halocarbon 41
(CHF3)
Hydrogen bromide
(HBr)
Hydrogen Fluoride
(HF)
Silicon tetrafluoride
(SiF4)
Xenon difluoride
(XeF2)
     

Doping / Diffusion

Argon
(Ar)
Helium
(He)
Hydrogen
(H2)*
Nitrogen
(N2)*
Mixtures
(Calibration etc)
20% F2 / N2 mixture Hexachlorodisilane
(HCDS)
Carbondioxide
(CO2)
Arsine
(AsH3)
Germane
(GeH4)
Phosphine
(PH3)
 

Laser gas

Helium
(He)
Hydrogen
(H2)*
Nitrogen
(N2)*
Mixtures
(Calibration etc)
Carbondioxide
(CO2)
Ar / F2 / Ne
(Argon / Fluorine / Neon - ArF laser)
Kr / F2 / Ne
(Krypton / Fluorine / Neon – KrF laser)
Ar / Xe / Ne
(Argon / Xenon / Neon Mixture)
Kr / Ne
(Krypton / Neon Mixture)
Ne
(Neon)
Xe
(Xenon)